Semiconductor Device

ABSTRACT

A semiconductor device includes: a first output unit configured to output a first phase; a second output unit configured to output a second phase different from the first phase, the second output unit being disposed to be stacked on the first output unit; and a controller configured to control the output units.

INCORPORATION BY REFERENCE

This application is a continuation of U.S. application Ser. No.12/826,334, filed on Jun. 29, 2010, which in turn is a continuation ofU.S. application Ser. No. 12/234,761, filed on Sep. 22, 2008, which inturn is based upon and claims the benefit of priority from priorJapanese Patent Application P2007-249498 filed on Sep. 26, 2007 andprior Japanese Patent Application P2008-021859 filed on Jan. 31, 2008;the entire contents of which are incorporated by reference herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device that is anintelligent power module including a power device and a control circuit.

2. Description of the Related Art

There has heretofore been known an IPM that is a power module in whichoutput units and a control circuit are integrally provided.Specifically, the output units include IGBTs or the like and can outputa plurality of different phases. Moreover, the control circuit is forcontrolling gates and the like of the IGBTs.

Japanese Patent Application Publication No. 2005-142228 (hereinafterPatent Document 1) discloses an IPM in which power devices (outputunits) for respectively outputting a U-phase, a V-phase and a W-phaseare arranged on one planar plate member.

However, the IPM disclosed in Patent Document 1 has a problem of anincreased plane area since the power devices are provided on one planarplate member.

SUMMARY OF THE INVENTION

The present invention was made to solve the problem described above, andaims to provide a semiconductor device whose plane area can be reduced.

As one aspect of the present invention, a semiconductor device includes:a first output unit configured to output a first phase; a second outputunit disposed to be stacked on the first output unit and configured tooutput a second phase different from the first phase; and a controllerconfigured to control the output units.

As another aspect of the present invention, the output unit furtherincludes a high voltage unit and a low voltage unit which is suppliedwith power having a voltage lower than that applied to the high voltageunit, and the high voltage unit and the low voltage unit are stacked.

As another aspect of the present invention, the high voltage unit andthe low voltage unit include semiconductor elements, and the highvoltage unit and the low voltage unit are stacked so that thesemiconductor elements thereof face each other.

As another aspect of the present invention, the high voltage unit andthe low voltage unit further include wirings and bus bars through whichcurrents flow. Moreover, any of the wirings and bus bars of the highvoltage unit and any of the wirings and bus bars of the low voltageunit, through which a current flows in a direction opposite to that of acurrent flowing through the any of the wirings and bus bars of the highvoltage unit, are disposed to each other in parallel.

As another aspect of the present invention, the first and second outputunits are provided upright on the controller. As another aspect of thepresent invention, the first and second output units further includecontrol bus bars for connection to the controller, and the control busbars are inserted into holes formed in the controller. As another aspectof the present invention, each of the first and second output unitsfurther includes a radiator plate for conducting heat in a directiondifferent from a direction in which the controller is disposed.

As another aspect of the present invention, the output units furtherinclude a plurality of semiconductor elements and a wiring board havingthe semiconductor elements provided thereon, and the plurality ofsemiconductor elements are disposed on both sides of the board.

As another aspect of the present invention, the semiconductor devicefurther includes a voltage regulator configured to regulate a voltagesupplied from outside. Each of the output units and the voltageregulator has a switching device that is switchable on and off. Amongthe output units and the voltage regulator, one having a highestfrequency for switching on and off the switching device is disposed onan outer side in a stacking direction.

As another aspect of the present invention, the voltage regulator has afrequency higher than that of each of the output units.

As another aspect of the present invention, the voltage regulator isdisposed on an upstream of all the output units in an air flow.

As another aspect of the present invention, the voltage regulatorfurther includes a high voltage unit having a switching device and a lowvoltage unit having a switching device and receiving a voltage lowerthan that applied to the high voltage unit. Moreover, a frequency forswitching on and off the switching device in the low voltage unit of thevoltage regulator is higher than a frequency for switching on and offthe switching device in the high voltage unit of the voltage regulator.Furthermore, the low voltage unit of the voltage regulator is disposedon an outer side in a stacking direction.

As another aspect of the present invention, the low voltage unit of thevoltage regulator is disposed on an upstream of the high voltage unit ofthe voltage regulator in an air flow.

The semiconductor device of the present invention can reduce a planearea by stacking the output units configured to output different phases.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an overall perspective view of an IPM according to a firstembodiment.

FIG. 2 is a cross-sectional view along the line II-II in FIG. 1.

FIG. 3 is a plan view of a U-phase output unit.

FIG. 4 is a cross-sectional view along the line IV-IV in FIG. 3.

FIG. 5 is a perspective view showing a switching device.

FIG. 6 is a perspective view showing a diode.

FIG. 7 is a schematic circuit diagram of the IPM.

FIG. 8 is a perspective view showing a step of assembling the IPM.

FIG. 9 is a perspective view showing a step of assembling the IPM.

FIG. 10 is a perspective view showing a step of assembling the IPM.

FIG. 11 is a cross-sectional view equivalent to FIG. 2, showing an IPMaccording to a second embodiment.

FIG. 12 is a plan view of an output unit on a high voltage unit side.

FIG. 13 is a plan view of an output unit on a low voltage unit side.

FIG. 14 is a cross-sectional view equivalent to FIG. 2, showing an IPMaccording to a third embodiment.

FIG. 15 is an overall perspective view of an IPM according to a fourthembodiment.

FIG. 16 is a plan view of a booster in the IPM according to the fourthembodiment.

FIG. 17 is a schematic circuit diagram of the IPM according to thefourth embodiment.

FIG. 18 is a cross-sectional view of an IPM according to a fifthembodiment.

DETAILED DESCRIPTION OF THE INVENTION First Embodiment

With reference to the drawings, description will be given of a firstembodiment in which the present invention is applied to a three-phaseintelligent power module (hereinafter referred to as an IPM). FIG. 1 isan overall perspective view of an IPM according to a first embodiment.FIG. 2 is a cross-sectional view along the line II-II in FIG. 1. FIG. 3is a plan view of a U-phase output unit. FIG. 4 is a cross-sectionalview along the line IV-IV in FIG. 3. FIG. 5 is a perspective viewshowing a switching device. FIG. 6 is a perspective view showing adiode. FIG. 7 is a schematic circuit diagram of the IPM. Note that, inthe following description, “top” and “bottom” shown in FIG. 2 representa vertical direction.

As shown in FIGS. 1 and 2, an IPM 1 according to the first embodimentincludes a U-phase output unit 2, a V-phase output unit 3, a W-phaseoutput unit 4, a controller 5 and a booster 6. The output units 2 to 4configured to output different phases and the booster 6 are stacked.Moreover, the output units 2 to 4 and the booster 6 are fixed withscrews (not shown) so as to be spaced apart from each other in a stateof standing vertically on the controller 5.

As shown in FIGS. 3 and 4, the U-phase output unit 2 includes a highvoltage unit 11, a low voltage unit 12, a wiring board 13, a radiatorplate 14, seven bus bars 15 to 21, a plurality of Al wires 22 and a case23.

A direct-current power having a high voltage (positive voltage) issupplied to the high voltage unit 11 from a P-side power supply unit.The high voltage unit 11 includes: a switching device 32 formed of annpn-type insulated gate bipolar transistor (IGBT), a metal oxidesemiconductor (MOS) transistor or the like; a commutating diode(hereinafter referred to as a diode) 33 for preventing a backflow; andan Al wiring 34 formed on the wiring board 13.

As shown in FIG. 5, a gate 32 g and a source 32 s are formed on an uppersurface of the switching device 32. On a lower surface of the switchingdevice 32, a drain 32 d is formed, which is connected to the Al wiring34 through solder. Note that, in the following description, a drain, agate and a source of another switching device will also be described byattaching symbols d, g and s to the number of the switching device. Asshown in FIGS. 3 and 7, the drain 32 d of the switching device 32 isconnected to the bus bar 16 for P side power supply through the Alwiring 34 and the Al wire 22. The source 32 s of the switching device 32is connected to the bus bar 15 for U-phase output through the Al wire22. Moreover, the source 32 s of the switching device 32 is alsoconnected to the bus bar 19 for connection to the booster 6 through theAl wire 22. The gate 32 g of the switching device 32 is connected to thebus bar 18 for connecting a gate driver through the Al wire 22.

Moreover, a material to form the switching device 32 is not particularlylimited, and any of Si, SiC, GaN, AlN, diamond and the like can be usedaccording to applications and purposes. For example, when switching lossor power loss is wished to be suppressed, SiC or GaN is preferable. Notethat SiC is also effective in the case of an operation at a hightemperature (about 300° C.). Moreover, GaN is preferable when theswitching device is wished to be driven at a high frequency. Note that,when GaN is used, inductance components (L components) and capacitycomponents (C components) can be further suppressed. Thus,miniaturization is also possible. Moreover, when a breakdown voltage iswished to be improved by increasing a breakdown coefficient, AlN ispreferable. Note that, when AlN is used and the wiring board 13 isformed of the same AlN, generation of thermal stress attributable to adifference in a thermal expansion coefficient can be suppressed.Moreover, since diamond has a physical value greater than all thematerials described above, use of the diamond leads to miniaturizationof the IPM 1 and a significant reduction in the power loss or theswitching loss.

The diode 33 is for preventing a current from flowing back to theswitching device 32. As shown in FIG. 6, an anode 33 a is formed on anupper surface of the diode 33. On a lower surface of the diode 33, acathode 33 k is formed, which is connected to the Al wiring 34 throughsolder. Note that, in the following description, an anode and a cathodeof another diode will also be described by attaching symbols a and k tothe number of the diode. As shown in FIGS. 3 and 7, the anode 33 a ofthe diode 33 is connected to the bus bar 15 for U-phase output throughthe Al wire 22. The cathode 33 k of the diode 33 is connected to the busbar 16 for P side power supply through the Al wiring 34 and the Al wire22. Specifically, the diode 33 is connected so as to allow a current toflow in a forward direction from the source 32 s to the drain 32 d ofthe switching device 32. Moreover, a material to form the diode 33 isnot particularly limited, and any of Si, SiC, GaN, AlN, diamond and thelike can be used according to applications and purposes as in the caseof the switching device 32.

A direct-current power having a voltage (negative voltage) which islower than the power supplied from the P side power supply unit issupplied to the low voltage unit 12 from an N side power supply unit.The low voltage unit 12 includes: a switching device 36 formed of annpn-type IGBT, a MOS (Metal Oxide Semiconductor) transistor or the like;a commutating diode (hereinafter referred to as a diode) 37 forpreventing a backflow; and an Al wiring 38 formed on the wiring board13.

A drain 36 d of the switching device 36 is connected to the bus bar 15for U-phase output through the Al wiring 38 and the Al wire 22. A source36 s of the switching device 36 is connected to the bus bar 17 for Nside power supply through the Al wire 22. Moreover, the source 36 s ofthe switching device 36 is also connected to the bus bar 20 forconnection to the booster 6 through the Al wire 22. A gate 36 g of theswitching device 36 is connected to the bus bar 21 for connecting a gatedriver.

An anode 37 a of the diode 37 is connected to the bus bar 17 for N sidepower supply through the Al wire 22. A cathode 37 k of the diode 37 isconnected to the bus bar 15 for U-phase output through the Al wiring 38and the Al wire 22.

The wiring board 13 is made of insulating Al₂O₃, AlN, Si₃N₄ or SiO₂. Onan upper surface of the wiring board 13, the Al wirings 34 and 38 areformed (direct brazed aluminum: DBA). Instead of the Al wirings 34 and38, a Cu wiring may be formed (direct bonding copper: DBC). Meanwhile,on a lower surface of the wiring board 13, the radiator plate 14 isbonded with a bonding agent (not shown) which is made of metal havinggood thermal conductivity (for example, Al, Cu or the like).

The radiator plate 14 is for releasing to the outside heat generated bythe high voltage unit 11 and the low voltage unit 12, the heat beingconducted through the wiring board 13. The radiator plate 14 isinsulated from the high voltage unit 11 and the low voltage unit 12 bythe insulating wiring board 13. As shown in FIG. 2, the radiator plate14 is formed of a thermally conductive anisotropic material having ahigh thermal conductivity in a direction S1 perpendicular to the plane,in other words, the direction S1 different from a direction in which thecontroller 5 is arranged. As the thermally conductive anisotropicmaterial, for example, one having aligned carbon fibers buried inaluminum or the like is applicable. A peripheral portion of the radiatorplate 14 is bonded with an adhesive to a lower surface of the case 23.

The bus bars 15 to 21 are fixed by burying their center portions in thecase 23. Thus, one ends of the bus bars 15 to 21 are arranged on aconcave portion 23 d side of the case 23 and the other ends thereof arearranged outside the case 23. The bus bars 15 to 21 are formed ofconductive Cu or Al in the form of plates. The bus bar 15 is foroutputting a U-phase. The bus bar 16 is for supplying P-side power. Thebus bar 17 is for supplying N-side power. Specifically, a current in adirection opposite to that of a current flowing through the bus bar 17flows through the bus bar 16. The bus bars 18 and 21 are connected togate drives 43 and 44 to be described later in the controller 5.Moreover, the bus bars 19 and 20 are connected to the booster 6 throughthe gate drives 43 and 44.

The case 23 is made of synthetic resin and formed into a rectangularplate. In a center portion of the case 23, a window 23 a is formed. Thewiring board 13 is fitted into the window 23 a. In the case 23, aconcave portion 23 d slightly larger than the window 23 a is formed. Theconcave portion 23 d is filled with protection gel 24 for protecting andinsulating the high voltage unit 11, the low voltage unit 12 and thelike. The protection gel 24 is made of soft silicon resin or epoxy resinthat has a resistance to heat of about 180° C. Moreover, an uppersurface of the protection gel 24 is covered with a cover 25 forpreventing leak of the protection gel 24 and for suppressing heatconduction to the high voltage unit 11 and the low voltage unit 12.

Since the V-phase output unit 3 and the W-phase output unit 4 haveapproximately the same configuration as that of the U-phase output unit2, only differences therebetween will be described. The V-phase outputunit 3 outputs a V-phase from the bus bar 15 for output, the V-phasebeing different in phase from the U-phase. The W-phase output unit 4outputs a W-phase from the bus bar 15 for output, the W-phase beingdifferent in phase from the U-phase and the V-phase. Bus bars 18 and 21of the V-phase output unit 3 are connected to gate drives 45 and 46 inthe controller 5. Moreover, bus bars 19 and 20 of the V-phase outputunit 3 are connected to the booster 6 through the gate drives 45 and 46.Bus bars 18 and 21 of the W-phase output unit 4 are connected to gatedrives 47 and 48 in the controller 5. Moreover, bus bars 19 and 20 ofthe W-phase output unit 4 are connected to the booster 6 through thegate drives 47 and 48.

The controller 5 includes a heat insulator 41, a wiring board 42, thesix gate drives 43 to 48 and Al wirings 50. Note that only some of theAl wirings 50 are illustrated in the drawings. The heat insulator 41 isfor suppressing conduction of heat from the phase output units 2 to 4 tothe heat sensitive gate drives 43 to 48, respectively. The heatinsulator 41 is made of insulating polyimide resin that has a resistanceto heat of about 350° C., and is disposed between the wiring board 42and the respective phase output units 2 to 4. In peripheral portions ofthe heat insulator 41 and the wiring board 42, holes 49 (see FIG. 10)for inserting therethrough the bus bars 15 to 21 for control and busbars 55 to 60 are formed. The Al wirings 50 for respectively connectingthe bus bars 18 to 21, the gate drives 43 to 48 and the bus bars 55 to60 are extended from the respective holes 49. The bus bars 18 to 21 andthe bus bars 55 to 60 are connected to the Al wirings 50 by use ofsolder.

The respective gate drives 43 to 48 are provided on the wiring board 42.The gate drive 43 (44) is for controlling the gate 32 g (36 g) of theswitching device (36) provided in the U-phase output unit 2. The gatedrive 45 (46) is for controlling the gate 32 g (36 g) of the switchingdevice 32 (36) provided in the V-phase output unit 3. The gate drive 47(48) is for controlling the gate 32 g (36 g) of the switching device(36) provided in the W-phase output unit 4.

As shown in FIG. 2, the booster 6 includes a booster circuit unit 51, anAl wiring 52, a wiring board 53, a radiator plate 54, the six bus bars55 to 60 connected to the gate drives 43 to 48, and the case 23. Thebooster 6 controls voltages of the sources 32 s and 36 s of theswitching devices 32 and 36 in the respective output units 2 to 4connected through the gate drives 43 to 48, the bus bars 19 and 20 andthe bus bars 55 to 60. Thus, voltages of the gates 32 g and 36 g of theswitching devices 32 and 36 are stabilized to suppress application of ahigh voltage to the gates 32 g and 36 g.

Next, operations of the IPM 1 will be described.

When the power is supplied from the bus bar 16 for P-side power supplyand the bus bar 17 for N-side power supply while controlling the gates32 g and 36 g of the switching devices 32 and 36 by the gate drives 43to 48, three-phase alternating-current power having different phases isoutputted by the phase output units 2 to 4. Moreover, during theoperation, heat is released in a direction S1 from the radiator plates14 of the output units 2 to 4. Accordingly, the heat is released to theoutside by the air passing through the spaces between the output units 2to 4.

Next, steps of assembling the IPM 1 will be described. FIGS. 8 to 10 areperspective views showing the steps of assembling the IPM.

First, as shown in FIG. 8, the case 23 is prepared by injection moldingin a state where the bus bars 15 to 21 are placed in a mold. Next, asshown in FIG. 9, the radiator plate 14, on which the high voltage unit11, the low voltage unit 12 and the wiring board 13 are bonded, isbonded to the case 23. Thereafter, as shown in FIG. 3, the Al wires 22are laid out. Next, as shown in FIG. 10, positioning is performed so asto allow the bus bars 15 to 21 and the bus bars 55 to 60 to correspondto the holes 49 in the controller 5. Thereafter, the output units 2 to 4and the booster 6 are inserted into the controller 5 and fixed withscrews (not shown). Subsequently, the bus bars 15 to 21 and the bus bars55 to 60 are electrically connected with solder to the Al wirings 50.Thus, the IPM 1 is completed.

As described above, in the IPM 1 according to the first embodiment, theoutput units 2 to 4 and the booster 6 are stacked. Thus, compared withthe case where all the above components are disposed on the same plane,a plane area on a plan view can be reduced. Moreover, since the outputunits 2 to 4 and the booster 6 are stacked, an increase in the planearea can be suppressed even when a rectifier circuit and the like arenewly provided.

Moreover, generally, in most cases, the gate drives are formed on theoutput units. Thus, heat from the output units are easily transmitted tothe gate drives. However, in the IPM 1, the output units 2 to 4 areprovided at right angles to the controller 5. Thus, heat transmissionfrom the output units 2 to 4 to the controller 5 can be suppressed.Furthermore, heat transmission can be further suppressed by providingthe heat insulator 41 between the gate drives 43 to 48 and the outputunits 2 to 4. Thus, even if the output units 2 to 4 are operated at ahigh temperature (for example, about 200° C.), breakage of the heatsensitive gate drives 43 to 48 can be suppressed. As a result, life ofthe IPM 1 can be extended.

Moreover, in the IPM 1, since the output units 2 to 4 and the booster 6are stacked so as to have certain spaces therebetween, high airpermeability is achieved. Accordingly, a cooling function can beimproved. Thus, breakage of the heat sensitive gate drives 43 to 48 canbe suppressed. Furthermore, by providing certain spaces between theoutput units 2 to 4 and the booster 6, heat transmission between theoutput units 2 to 4 can be suppressed. Thus, breakage of the switchingdevices 32 and 36 and the diodes 33 and 37 of the output units 2 to 4can be suppressed. As a result, the life of the IPM 1 can be extended.Furthermore, in the IPM 1, since the output units 2 to 4 and the booster6 are stacked, the switching devices 32 and 36 and the diodes 33 and 37can be prevented from being adjacent to each other. Thus, concentrationof heat can be suppressed.

Moreover, the bus bars 15 to 21 for control and the bus bars 55 to 60are connected to the Al wirings 50 in a state where the bus bars areinserted into the holes 49 in the controller 5. Thus, positioning andconnection can be easily performed.

Second Embodiment

Next, description will be given of a second embodiment obtained bypartially modifying the first embodiment described above. Note that thesame constituent components as those of the first embodiment are denotedby the same reference numerals and description thereof will be omitted.FIG. 11 is a cross-sectional view equivalent to FIG. 2, showing an IPMaccording to the second embodiment. FIG. 12 is a plan view of an outputunit on a high voltage unit side. FIG. 13 is a plan view of an outputunit on a low voltage unit side.

As shown in FIG. 11, in an IPM 1A according to the second embodiment,output units 2A to 4A having high voltage units 11 and output units 2Bto 4B having low voltage units 12 are formed of different components.Moreover, the output units 2A to 4A on the high voltage unit 11 side andthe output units 2B to 4B on the low voltage unit 12 side are fixed to acontroller 5A so as to be stacked on each other.

As shown in FIG. 12, the output unit 2A has approximately the sameconfiguration as that of a half of the output unit 2 on the high voltageunit 11 side in the first embodiment. Moreover, as shown in FIG. 13, theoutput unit 2B has approximately the same configuration as that of ahalf of the output unit 2 on the low voltage unit 12 side in the firstembodiment.

As shown in FIGS. 12 and 13, the output units 2A and 2B include bus bars15A and 15B for output, respectively. Moreover, the output units 2A and2B are stacked so that bus bars 16 and 17, through which currents flowin opposite directions, is parallel to each other. Note that the outputunits 3A and 4A have the same configuration as that of the output unit2A, and the output units 3B and 4B have the same configuration as thatof the output unit 2B.

In the IPM 1A according to the second embodiment, the output units 2A to4A on the high voltage unit 11 side and the output units 2B to 4B on thelow voltage unit 12 side are separately configured and stacked. Thus, aplane area can be further reduced. Moreover, by disposing the bus bars16 and 17 so that they are parallel to each other, parasitic inductancesgenerated in the bus bars 16 and 17 can be cancelled. Note that, the IPM1A is preferably configured so that any other pair of bus bars or Alwirings on the high and low voltage unit sides can be disposed to eachother in parallel if the pair of bus bars or Al wirings let currentsflow therethrough in opposite directions.

Third Embodiment

Next, description will be given of a third embodiment obtained bypartially modifying the second embodiment described above. Note that thesame constituent components as those of the first and second embodimentsare denoted by the same reference numerals and description thereof willbe omitted. FIG. 14 is a cross-sectional view equivalent to FIG. 2,showing an IPM according to the third embodiment.

As shown in FIG. 14, in an IPM 1B according to the third embodiment, theoutput units 2A to 4A on the high voltage unit 11 side in the IPM 1A inthe second embodiment are turned upside down and mounted on thecontroller 5A. Specifically, the switching device 32 and the diode 33 inthe high voltage unit 11 and the switching device 36 and the diode 37 inthe low voltage unit 12 are arranged so as to face each other.

According to the configuration described above, parasitic inductances tobe cancelled can be increased.

Fourth Embodiment

Next, description will be given of a fourth embodiment obtained bypartially modifying the first embodiment described above. Note that thesame constituent components as those of the above embodiments aredenoted by the same reference numerals and description thereof will beomitted. FIG. 15 is an overall perspective view of an IPM according tothe fourth embodiment. FIG. 16 is a plan view of a booster in the IPMaccording to the fourth embodiment. FIG. 17 is a schematic circuitdiagram of the IPM according to the fourth embodiment. Note that, in thefollowing description, “top” and “bottom” shown in FIG. 15 represent avertical direction. Moreover, the same constituent components as thoseof the above embodiments are denoted by the same reference numerals anddescription thereof will be omitted.

As shown in FIG. 15, an IPM 1C according to the fourth embodimentincludes a U-phase output unit 2, a V-phase output unit 3, a W-phaseoutput unit 4, a controller 5C and a booster (equivalent to a voltageregulator in claim 9) 6C. The output units 2 to 4 configured to outputdifferent phases and the booster 6C are stacked. Moreover, the outputunits 2 to 4 and the booster 6C are fixed with screws (not shown) so asto be spaced apart from each other in a state of standing vertically onthe controller 5C.

The booster 6C increases a voltage of 200 V supplied from an externalpower source 200 to 600 V. Moreover, the booster 6C is for supplyingboosted power to the output units 2 to 4 through respective bus bars 16and 17. The booster 6C is disposed on a lowermost layer in a stackingdirection (i.e., an outer layer in a stacking direction). Note that thevoltage value described above can be changed as needed.

As shown in FIG. 16, the booster 6C includes a high voltage unit 71, alow voltage unit 72, a coil 73, a capacitor 74, a substrate 75, aradiator plate 76, four bus bars 77 to 81, a plurality of Al wires 82, acase 83 and Al wirings 84 and 85.

As shown in FIGS. 16 and 17, the high voltage unit includes: a switchingdevice 92 formed of a transistor that can be switched on and off; adiode 93 for preventing a backflow; and an Al wiring 94. A source 92 sof the switching device 92 is connected to the coil 73 through the Alwiring 84. A drain 92 d of the switching device 92 is connected to thebus bar 78 for P-side power supply, to which one end of the capacitor 74is connected, through the Al wiring 94. A gate 92 g of the switchingdevice 92 is connected to the gate driver 56 in the controller 5Cthrough the bus bar 80. An anode 93 a of the diode 93 is connected toone end of the coil 73 and the source 92 s of the switching device 92through the Al wiring 84. A cathode 93 k of the diode 93 is connected tothe bus bar 78, to which the one end of the capacitor 74 is connected,through the Al wiring 94.

The low voltage unit 72 includes: a switching device 96 formed of atransistor that can be switched on and off; a diode 97 for preventing abackflow; and an Al wiring 98. Note that a voltage lower than thevoltage applied to the high voltage unit 71 is applied to the lowvoltage unit 72 by an external power source 200. A source 96 s of theswitching device 96 is connected to the bus bar 79 for N-side powersupply, which is connected to a negative electrode of the power source200 and one end of the capacitor 74. A drain 96 d of the switchingdevice 96 is connected to one end of the coil 73 through the Al wiring98. A gate 96 g of the switching device 96 is connected to the gatedriver 57 in the controller 5C through the bus bar 81. An anode 97 a ofthe diode 97 is connected to the bus bar 79 for N-side power supply. Acathode 97 k of the diode 97 is connected to the one end of the coil 73through the Al wiring 98.

The one end of the coil 73 is connected to the source 92 s of theswitching device 92, the anode 93 a of the diode 93, the drain 96 d ofthe switching device 96 and the cathode 97 k of the diode 97 through theAl wiring 84. The other end of the coil 73 is connected to a positiveelectrode of the power source 200 through the bus bar 77.

The one end of the capacitor 74 is connected to the bus bar 78 forsupplying P-side power to the output units 2 to 4. The other end of thecapacitor 74 is connected to the bus bar 79 for supplying N-side powerto the output units 2 to 4 through the Al wiring 85.

Next, operations of the booster 6C will be described.

When the switching device 96 in the low voltage unit 72 is on, currentsflow through the coil 73 and the switching device 96. When the switchingdevice 96 in the low voltage unit 72 is switched off from the abovestate, the flowing current is blocked and electromotive force isgenerated in the coil 73. When the switching device 92 in the highvoltage unit 71 is switched off in the state where the electromotiveforce is generated in the coil 73, charges are supplied to the capacitor74 from the coil 73 through the high voltage unit 71. Thus, the chargesare accumulated in the capacitor 74 by the voltage of the power source200 and the electromotive force in the coil 73. As a result, the voltageof the power source 200 is increased by the capacitor 74 and thenapplied to the output units 2 to 4.

Here, frequencies for switching on and off the switching devices 92 and96 in the booster 6C are higher than those for switching on and off theswitching devices 32 and 36 in each of the output units 2 to 4.Furthermore, a frequency for switching on and off the switching device96 of the low voltage unit 72 in the booster 6C is higher than that forswitching on and off the switching device 92 of the high voltage unit 71in the booster 6C.

Specifically, a temperature of the booster 6C is higher than that ofeach of the output units 2 to 4. Furthermore, in the booster 6C, atemperature of the low voltage unit 72 is higher than that of the highvoltage unit 71.

As described above, in the IPM 1C according to the fourth embodiment,the booster 6C, of which temperature rises above that of the outputunits 2 to 4, is disposed so as to be an outer layer in a stackingdirection. Thus, heat release properties of the booster 6C can beimproved. Furthermore, by setting the booster 6C as the lowermost layer,the booster 6C is positioned on an uppermost side of the flow of air.Thus, the heat from the output units 2 to 4 never acts on the booster6C. Consequently, temperature rise of the booster 6C can be furthersuppressed.

Moreover, in order to suppress temperature rise of the booster, thebooster has heretofore been provided for each output unit. However, inthe IPM 1C, since the temperature rise of the booster 6C can besuppressed, the booster 6C can be shared by the output units 2 to 4.Thus, miniaturization of the IPM 1C can be further facilitated.

Fifth Embodiment

Next, description will be given of a fifth embodiment obtained bypartially modifying the third embodiment described above. Note that thesame constituent components as those of the above embodiments aredenoted by the same reference numerals and description thereof will beomitted. FIG. 18 is a cross-sectional view of an IPM according to thefifth embodiment.

As shown in FIG. 18, in an IPM 1D according to the fifth embodiment,output units 2A to 4A having high voltage units 11 and output units 2Bto 4B having low voltage units 12 are formed of different components, asin the case of the third embodiment. Moreover, the output units 2A to 4Aon the high voltage unit 11 side and the output units 2B to 4B on thelow voltage unit side are fixed to a controller 5A so as to bealternately stacked on each other.

Furthermore, in the IPM 1D according to the fifth embodiment, a booster6D having a high voltage unit 71 and a booster 6E having a low voltageunit 72 are formed of different components. The booster 6E having thelow voltage unit 72 is disposed on a lowermost layer in a stackingdirection. Moreover, the booster 6D having the high voltage unit 71 isdisposed on an uppermost layer in the stacking direction. The outputunits 2A to 4A and 2B to 4B are stacked between the booster 6E havingthe low voltage unit 72 and the booster 6D having the high voltage unit71. Specifically, the boosters 6E and 6D undergoing temperature rise aredisposed on the lowermost and uppermost layers, that is, on theoutermost side in the stacking direction. Furthermore, given that theair flows from the high-temperature side to the low-temperature side,the booster 6E having the low voltage unit 72 is disposed on theuppermost side of the flow of air.

As described above, in the IPM 1D according to the fifth embodiment, thehigh voltage unit 71 in the booster 6D and the low voltage unit 72 inthe booster 6E are disposed on the outermost layers in the stackingdirection. Thus, heat release properties of the high voltage unit 71 inthe booster 6D and the low voltage unit 72 in the booster 6E, both ofwhich undergo temperature rise, can be improved. Furthermore, bydisposing the low voltage unit 72 in the booster 6E on the uppermostside of the flow of air, temperature rise of the low voltage unit 72 inthe booster 6E can be further suppressed.

Although the present invention has been described in detail by use ofthe embodiments, the present invention is not limited to the embodimentsdescribed in this specification. The scope of the present invention isdetermined by description of the scope of claims and scopes equivalentto the description of the scope of claims. Hereinafter, modifiedembodiments obtained by partially modifying the above embodiments willbe described.

For example, in the above embodiments, the description was given of theexample where the present invention is applied to the three-phase IPM.However, the present invention may be applied to IPMs with two, four ormore phases.

Moreover, the materials, values, shapes and the like used in the aboveembodiments are illustrative only and can be changed accordingly.

Moreover, in the above embodiments, the switching devices assemiconductor elements and the diodes in the output units are disposedon the same plane of the wiring board. However, the switching devicesand the diodes may be disposed on both sides, front and back surfaces,of the wiring board. Thus, the plane area can be further reduced.

Moreover, in the above embodiments, the description was given of theexample where the output units are stacked with certain spacestherebetween. However, the spaces between the output units may beomitted. Note that, when such a configuration is used, holes for lettingair pass therethrough are preferably provided in the case.

Moreover, in the above embodiments, one switching device is provided ineach of the high voltage unit and the low voltage unit in each of theoutput units. However, a plurality of switching devices may be connectedin parallel in each of the high voltage unit and the low voltage unit ineach of the output units.

Moreover, in the above embodiments, the booster is described as anexample of a voltage regulator. However, one capable of regulating avoltage is also applicable, such as a step-down unit for lowering avoltage supplied from the outside.

1-13. (canceled)
 14. A semiconductor device comprising: a first outputunit configured to output a first phase; a second output unit disposedto be stacked on the first output unit and configured to output a secondphase different from the first phase; and a controller configured tocontrol the output units, wherein: the output unit further includes ahigh voltage unit and a low voltage unit which is supplied with powerhaving a voltage lower than that applied to the high voltage unit, thehigh voltage unit and the low voltage unit are stacked, the first andsecond output units are provided upright on the controller, each of thefirst and second output units further includes a radiator plate forconducting heat in a direction different from a direction in which thecontroller is disposed, the radiator plate is formed of a thermallyconductive anisotropic material having a higher thermal conductivity ina first direction perpendicular to the radiator plate than a seconddirection in which the controller is arranged, the first direction beingdifferent from the second direction, and the thermally conductiveanisotropic material has aligned carbon fibers buried in aluminum. 15.The semiconductor device according to claim 14, wherein a peripheralportion of the radiator plate is bonded with an adhesive to a lowersurface of a case, the case is made of synthetic resin and in the formof a rectangular plate, a window is in a center portion of the case, awiring board is fitted into the window, a concave portion slightlylarger than the window is in the case, the concave portion is filledwith a protection gel to protect and insulate the high voltage unit andthe low voltage unit, and the protection gel is made of a soft siliconresin or an epoxy resin.
 16. The semiconductor device according to claim15, wherein the protection gel has a resistance to heat at a temperatureof about 180° C.
 17. The semiconductor device according to claim 16,wherein an upper surface of the protection gel is covered with a coverto prevent leak of the protection gel and to suppress heat conduction tothe high voltage unit and the low voltage unit.
 18. A semiconductordevice comprising: a first output unit configured to output a firstphase; a second output unit disposed to be stacked on the first outputunit and configured to output a second phase different from the firstphase; and a controller configured to control the output units, wherein:the output units further include a plurality of semiconductor elementsand a wiring board having the semiconductor elements provided thereon,the plurality of semiconductor elements are disposed on both sides ofthe board, the first and second output units are provided upright on thecontroller, the first and second output units further include controlbus bars for connection to the controller, the control bus bars areinserted into holes formed in the controller, and each of the first andsecond output units further includes a radiator plate for conductingheat in a direction different from a direction in which the controlleris disposed, the radiator plate is formed of a thermally conductiveanisotropic material having a higher thermal conductivity in a firstdirection perpendicular to the radiator plate than a second direction inwhich the controller is arranged, the first direction being differentfrom the second direction, and the thermally conductive anisotropicmaterial is one having aligned carbon fibers buried in aluminum.
 19. Thesemiconductor device according to claim 18, wherein a peripheral portionof the radiator plate is bonded with an adhesive to a lower surface of acase, the case is made of synthetic resin in the form of a rectangularplate, a window is in a center portion of the case, a wiring board isfitted into the window, a concave portion slightly larger than thewindow is in the case, the concave portion is filled with a protectiongel to protect and insulate the high voltage unit and the low voltageunit, and the protection gel is made of a soft silicon resin or an epoxyresin.
 20. The semiconductor device according to claim 19, wherein theprotection gel has a resistance to heat of about 180° C.
 21. Thesemiconductor device according to claim 13, wherein an upper surface ofthe protection gel is covered with a cover to prevent leak of theprotection gel and to suppress heat conduction to the high voltage unitand the low voltage unit.
 22. The semiconductor device according toclaim 18, wherein the high voltage unit and the low voltage unit includesemiconductor elements, and the high voltage unit and the low voltageunit are stacked so that the semiconductor elements thereof face eachother.